4-1 Research Subjects
(1) Micro-Processing Technology:
Technology of making a minute electronic circuit is essential to produce a micro-device with higher performance. The minute electronic circuit is made by a combination of micro-processing technologies, such as copper plating, etching, chemical/mechanical polishing, printing by jet, making thin film, and so on. Therefore, it is important to investigate and develop these micro-processing technologies from the view point of electro-chemical engineering, fine particle technology, fluid dynamics, and reaction engineering.
(2) Heat Discharge Technology:
Since the heat production per unit volume in the micro-device increases with increasing number of electronic parts in the device, it is indispensable to discharge the excess heat from the device. Therefore, it is important to establish a methodology of applying the non-linear heat conduction analysis to such a complicated structure as the micro-device. It is urgent not only to develop materials with high thermal conductivity, but also to increase the rate of convective heat transfer from the device to the atmosphere.
(3) Simulation for Reliable Design:
Design of high reliability is essential to produce a complicated micro-device composed of various kinds of organic and inorganic materials. The reliable design depends on the reliability of simulation of manufacturing process and phenomena occurring in the device, such as flow of plastics, mass transfer of ion, and so on. Therefore, it is important to establish the reliable simulation method based on the fluid dynamics, diffusion engineering, fine particle technology, and reaction engineering.
(4) Interconnection Technology:
Technology of firm sticking and attaching an interface to another, called the interconnection technology, is essential to produce a complicated micro-device which has many interfaces between various materials. Therefore, it is important to investigate the interconnection technologies, such as sticking in the vacuum, thermal sticking, or sticking with ultra-sound-wave, from the view point of the interface controlling engineering.
(5) Sustainability Technology:
Energy saving and decrease of damage to the environment are greatly required in the manufacturing process of devices and materials. Therefore, it is important to investigate the sustainability technologies, such as recycling, soldering with lead-free material, substitute for rare earth metal, sensing technology, from the view point of environmental chemical engineering.